纳米压印胶

Resist formulation

mr-NIL210- 100nm

mr-NIL210- 200nm

mr-NIL210- 300nm

Film thickness（nm）

100 ± 15

200 ± 20

500 ± 25

Appearence, colour

                                                       clear, colourless

Dynamic viscosity

1.4 ± 0.2

1.7 ± 0.2

2.9 ± 0.5

Density

0.998 ± 0.005

1.004 ± 0.005

1.023 ± 0.005

Refractive index

1.515 ± 0.002

1.515 ± 0.002

1.517 ± 0.002

Filtration level

0.1

0.1

0.1